ZeGage Pro 3D光學輪廓儀，垂直精度3.5nm

I’ve been using the SmartSetup feature daily, and it dramatically cuts down the time to get a clean measurement on complex surfaces. The manual tilt stages with 4 degrees of adjustment give me the fine control I need for tricky sample angles.

The SureScan capability saved me hours of manual scanning, and the 3D surface data it produces is incredibly clean and repeatable. I’ve been able to measure sub-micron features on my prototypes with confidence.

The 4-degree manual tilt stage made aligning those tricky angled samples way easier than I expected, and the 3.5nm vertical precision held up beautifully across a full batch of measurements. It's pricey, but the SmartSetup cut my learning curve down to a single afternoon.